ANGSTROM
ANGSTROM: 1
ångström (Å) = 1.0 x 10-10 meters = 0.1 nm =
100 picometers
ANODE
An anode is an electrode through
which electric current flows into a polarized electrical
device.
BREWSTER'S ANGLE
Brewster's
angle (also known as the polarization angle) is an optical phenomenon
named after the Scottish physicist, Sir David Brewster. When light
moves between two media of differing refractive index, generally
some of it is reflected at the boundary. At one particular angle
of incidence, however, light with one particular polarization cannot
be reflected. This angle of incidence is Brewster's angle, θ B.
The polarization that cannot be reflected at this angle is the one
for which the electric field of the light waves lies in the same
plane as the incident ray and the surface normal. Light with this
polarization is said to be p-polarized, because it is parallel
to the plane. Light with the perpendicular polarization is said to
be s-polarized, from the German senkrecht-perpendicular.
When unpolarized light strikes a surface at Brewster's angle, the
reflected light is always s-polarized.
CATHODE
A cathode is an electrode through which electric current flows out of a polarized electrical device.
CONTRAST RATIO
CONTRAST RATIO: A
display system defined as the ratio of the luminosity of the brightest
and the darkest color a system is capable of producing.
DEIONIZED WATER
DEIONIZED WATER: Water
that lacks ions; such as cations from sodium, calcium, iron, copper,
and anions such
as chloride and bromide. This means it has been purified from all
other ions except H3O+ and OH-, but
it may still contain other non-ionic types of impurities such as organic
compounds. The lack of ions causes the water's resistivity to increase.
DIODE
In
electronics, a diode is a component
that restricts the direction of movement of charge carriers. Basically,
it allows an electric current to flow in one direction, but blocks
it in the opposite direction. Thus, the diode can be thought of as
an electronic version of a check valve. Circuits that require current
flow in only one direction will typically include one or more diodes
in the circuit design.
ELECTROMAGNETIC RADIATION
Electromagnetic radiation is
a self-propagating wave in space
with electric and magnetic components. These components oscillate
at right angles to each other and to the direction of propagation,
and are in phase with each other. Electromagnetic radiation is classified
into types according to the frequency of the wave: these types include,
in order of increasing frequency, radio waves, microwaves, infrared
radiation, visible light, ultraviolet radiation, X-rays and gamma rays. EM radiation
carries energy and momentum, which may be imparted when it interacts
with matter. Interference is the superposition of
two or more waves resulting in a new wave pattern. If the fields have
components in the same direction, they constructively interfere,
while opposite directions cause destructive interference.
ELECTROMAGNETIC SPECTRUM

Electromagnetic spectrum with light highlighted

Legend:
γ = Gamma rays
HX = Hard X-rays
SX = Soft X-Rays
EUV = Extreme ultraviolet
NUV = Near ultraviolet
Visible light
NIR = Near infrared
MIR = Moderate infrared
FIR = Far infrared
Radio waves:
EHF = Extremely high frequency
(Microwaves)
SHF = Super high frequency (Microwaves)
UHF = Ultrahigh frequency
VHF = Very high frequency
HF = High frequency
MF = Medium frequency
LF = Low frequency
VLF = Very low frequency
VF = Voice frequency
ELF = Extremely low frequency
EM radiation with a wavelength
between approximately 400 nm and 750 nm is detected by the human
eye and perceived as visible light.
ELECTRONS
Electrons are subatomic particles
which have a negative charge, and a size which is so small as to be
almost unmeasurable, and which are the least heavy of the three principal
components of an atom.
IONS
An ion is an atom or group of atoms
that normally are electrically neutral
and achieve their status as an ion by loss or addition of one or more electrons.
The simplest ions are the proton (a
hydrogen ion, H+, positive charge), and alpha particle
(helium ion, He2+, consisting of two protons and two neutrons).
A negatively charged ion, which has more electrons in its electron
shells than it has protons in its nuclei, is known as an anion due
to its attraction to anodes.
A positively-charged ion, which has fewer electrons than protons,
is known as a cation due to its attraction to cathodes.
Ions are denoted in the same way as electrically neutral atoms and
molecules except for the presence of a superscript indicating the
sign of the net electric charge and the number of electrons lost or
gained, if more than one. For example: H+, SO42-.
JOULE
As a rough guide, 1 joule is the
amount of energy required to lift a one kilogram object up by a height
of about 100 centimeters on the surface of the Earth, by the most
efficient method.
JFETs
Junction Field Effect Transistor.
The common transistor is called
a junction transistor, and it was the key device which led to the
solid state electronics revolution. In application, the junction
transistor has the disadvantage of low input impedance because the
base of the transistor is the signal input and the base-emitter
diode is forward biased. Another device achieved transistor action with the input diode junction reversed biased, and this device is called a "field effect transistor" or a "junction field effect transistor", JFET. With the reverse biased input junction, it has very high input impedance. Having high input impedance minimizes the interference with or "loading" of the signal source when a measurement is made.
LASER
A LASER (acronym for Light Amplification
by Stimulated Emission of Radiation)
is an optical source that emits photons in a coherent beam.
NEUTRONS
Neutrons, which have no charge,
are about 1838 times more massive
than electrons.
PELTIER EFFECT
The Peltier effect is the reverse
of the Seebeck effect; a creation
of a heat difference from an electric voltage. It occurs when a current
is passed through two dissimilar metals or semiconductors that are
connected to each other at two junctions (Peltier junctions). The
current drives a transfer of heat from one junction to the other:
one junction cools off while the other heats up; as a result, the
effect is often used for thermoelectric cooling. An interesting consequence
of this effect is that the direction of heat transfer is controlled
by the polarity of the current; reversing the polarity will change
the direction of transfer and thus the sign of the heat absorbed.
PHASE VELOCITY
The rate at which the phase of the
waveform is moving.
PHOTON
In physics, the photon is the elementary
particle responsible for electromagnetic phenomena. It mediates
electromagnetic interactions and makes up all forms of light. The
photon has zero invariant mass and travels at the constant
speed c, the speed of light in empty space. However, in the
presence of matter, a photon can
be slowed or even absorbed, transferring energy and momentum proportional
to its frequency.
PIN DIODE
Layers of a PIN diode
PIN diode (p-type, intrinsic, n-type diode) is a diode with a wide, undoped intrinsic
semiconductor region between p-type semiconductor and n-type semiconductor regions.
PLASMA
A collection of gas-like ions, or
even a gas containing a proportion
of charged particles, is called plasma. The free electric charges
make the plasma electrically conductive so that it responds strongly
to electromagnetic fields.
PROTONS
Protons, which have a positive charge,
and are about 1836 times more massive
than electrons.
RAD
The rad is a unit of radiation dose. Rad stands
for "radiation absorbed dose".
The rad is a unit of radiation absorption
defined in terms of the energy actually deposited in the tissue. One
rad is an absorbed dose of 0.01 joules of energy per kilogram of tissue.
RADIATION (X-RAYS, ALPHA PARTICLES, BETA PARTICLES, RADIATION EXPOSURE TABLE)
Radiation in physics is the process of emitting energy in the form
of waves or particles. Various types of radiation can be distinguished,
depending on the properties of the emitted energy/matter, the type
of the emission source, properties and purposes of the emission,
etc.
TYPES OF RADIATION
X-RAYS: X-rays (or Röntgen
rays) are a form of electromagnetic radiation with a wavelength
in the range of 10 to 0.01 nanometers. X-rays are a form
of ionizing radiation and as such can be dangerous. X-rays are low a spectrum,
low intensity form of gamma-rays (γ).
ALPHA PARTICLES: Alpha particles (a) are a highly ionizing
form of particle radiation that has a low penetration. They consist of two protons and
two neutrons bound together into a particle identical to
a helium nucleus (He2+).
BETA PARTICLES: Beta particles (ß) are high-energy, high-speed electrons,
and are a form of ionizing radiation. The production of beta particles is
termed beta decay.

Alpha radiation consists of helium
nuclei and is stopped by a sheet of paper. Beta radiation, consisting
of electrons, is stopped by an aluminum plate. Gamma
(and x-ray) radiation is eventually absorbed as they penetrate a
dense material, such as lead.
Radiation Exposure Table of exposure levels and
symptoms
0.05-0.2 Sv (5-20 REM)
No symptoms. A few researchers contend
that low dose radiation may be beneficial. 50 mSv is the yearly federal
limit for radiation workers in the United States.
0.2-0.5 Sv (20-50 REM)
No noticeable symptoms. Red blood cell count decreases temporarily.
0.5-1 Sv (50-100 REM)
Causes mild radiation sickness with headache and increased risk of
infection due to disruption of immunity cells. Temporary male sterility is
possible.
1-2 Sv (100-200 REM)
Light radiation poisoning, 10% fatality after 30 days. Typical symptoms
include mild to moderate nausea, with occasional vomiting, beginning 3 to
6 hours after irradiation and lasting for up to one day. This is followed
by a 10 to 14 day latent phase, after which light symptoms like general illness
and fatigue appear. The immune system is depressed, with convalescence extended
and increased risk of infection. Temporary male sterility is common. Spontaneous
abortion or stillbirth will occur in pregnant women.
2-3 Sv (200-300 REM)
Severe radiation poisoning, 35% fatality after 30 days. Nausea is
common, with 50% risk of vomiting at 2.8 Sv. Symptoms onset at 1 to 6 hours
after irradiation and last for 1 to 2 days. After that, there is a 7 to 14
day latent phase, after which the following symptoms appear: loss of hair
all over the body, fatigue and general illness. There is a massive loss of
leukocytes (white blood cells), greatly increasing the risk of infection.
Permanent female sterility is possible. Convalescence takes one to several
months.
3-4 Sv (300-400 REM)
Severe radiation poisoning, 50% fatality after 30 day. Other symptoms
are similar to the 2-3 Sv dose, with uncontrollable bleeding in the mouth,
under the skin and in the kidneys after the latent phase.
4-6 Sv (400-600 REM)
Acute radiation poisoning, 60% fatality after 30 days. Fatality increases
from 60% at 4.5 Sv to 90% at 6 Sv (unless there is intense medical care).
Symptoms start half an hour to two hours after irradiation and last for up
to 2 days. After that, there is a 7 to 14 day latent phase, after which generally
the same symptoms appear as with 3-4 Sv irradiation, with increased intensity.
Female sterility is common at this point. Convalescence takes several months
to a year. The primary causes of death (in general 2 to 12 weeks after irradiation)
are infections and internal bleeding.
6-10 Sv (600-1,000 REM)
Acute radiation poisoning, near 100% fatality after 14 days. Survival
depends on intense medical care. Bone marrow is nearly or completely destroyed,
so a bone marrow transplant is required. Gastric and intestinal tissues are
severely damaged. Symptoms start 15 to 30 minutes after irradiation and last
for up to 2 days. Subsequently, there is a 5 to 10 day latent phase, after
which the person dies of infection or internal bleeding. Recovery would take
several years and probably would never be complete.
Devair Alves Ferreira received a dose of approximately 7.0 Sv (700 REM) during
the Goiânia accident and survived, partially due to his fractionated exposure.
10-50 Sv (1,000-5,000 REM)
Acute radiation poisoning, 100% fatality after 7 days. An exposure this
high leads to spontaneous symptoms after 5 to 30 minutes. After follows powerful
fatigue and immediate nausea caused by direct activation of chemical receptors
in the brain by the irradiation, there is a period of several days of comparative
well-being, called the latent (or "walking ghost") phase. After that,
cell death in the gastric and intestinal tissue, causing massive diarrhea, intestinal
bleeding and loss of water, leads to water-electrolyte imbalance. Death sets
in with delirium and coma due to breakdown of circulation. Death is inevitable;
the only treatment that can be offered is pain therapy.
Louis Slotin was exposed to approximately 21 Sv in a criticality accident on
21 May 1946, and died nine days later on 30 May.
REFRACTIVE INDEX
The refractive
index of a material is the factor by which the phase
velocity of electromagnetic radiation is slowed in that material, relative to its velocity in a vacuum.
REM
The röntgen
(roentgen) equivalent in man
or rem is a unit of radiation dose.
It is the product of the absorbed
dose in röntgens (R) and the biological efficiency of the radiation.
A rem is a large amount of radiation, so the millirem (mrem), which is one thousandth
of a rem, is often used for the dosages
commonly encountered, such as the amount of radiation received from
medical x-rays and background sources.
SCALE (EXPONENTS,
PREFIX, SCALE, DECIMAL EQUIVALENT)
10n
|
Prefix
|
Symbol
|
Short scale
|
Decimal equivalent
|
1012
|
tera
|
T
|
Trillion
|
1 000 000 000 000
|
109
|
giga
|
G
|
Billion
|
1 000 000 000
|
106
|
mega
|
M
|
Million
|
1 000 000
|
103
|
kilo
|
k
|
Thousand
|
1 000
|
102
|
hecto
|
h
|
Hundred
|
100
|
101
|
deca
|
da
|
Ten
|
10
|
100
|
(none)
|
(none)
|
One
|
1
|
10-1
|
deci
|
d
|
Tenth
|
0.1
|
10-2
|
centi
|
c
|
Hundredth
|
0.01
|
10-3
|
milli
|
m
|
Thousandth
|
0.001
|
10-6
|
micro
|
µ (u)
|
Millionth
|
0.000 001
|
10-9
|
nano
|
n
|
Billionth
|
0.000 000 001
|
10-12
|
pico
|
p
|
Trillionth
|
0.000 000 000 001
|
SIEVERT
The sievert (symbol: Sv) is a unit
of dose equivalent. It attempts to
reflect the biological effects of radiation as opposed to the physical aspects.
SPUTTERING
Sputtering is a physical process
where atoms in a solid target material are ejected into the gas phase
due to bombardment of the material by energetic ions.
It is commonly used for thin-film deposition. Sputtering
is largely driven by a momentum exchange between the ions and atoms
in the material, due to collisions. The process can be thought of
as atomic billiards, with the ion (cue ball) striking a large cluster
of close-packed atoms (billiard balls). Although the first collision
pushes atoms deeper into the cluster, subsequent collisions between
the atoms can result in some of the atoms near the surface being ejected
away from the cluster. The number of atoms ejected from the surface
per incident ion is called the sputter yield and is an important
measure of the efficiency of the sputtering process. Other things
the sputter yield depends on are the energy of the incident ions,
the masses of the ions and target atoms, and the binding energy of
atoms in the solid.
The ions for the sputtering process are supplied
by a plasma that is induced in the sputtering equipment.
In practice a variety of techniques are used to modify the plasma properties,
especially ion density, to achieve the optimum sputtering conditions,
including usage of RF (radio frequency) alternating current, utilization
of magnetic fields, and application of a bias voltage to the target.
For thin film deposition
Sputter deposition is a method of depositing thin films by sputtering a
block of source material onto a substrate. Sputtered atoms ejected
into the gas phase are not in their thermodynamic equilibrium state,
and tend to deposit on all surfaces in the vacuum chamber.
A substrate (such as a wafer) placed in the chamber will be coated
with a thin film. Sputtering usually uses argon plasma.
TEC (PELTIER COOLER)
A Peltier cooler
heater or thermoelectric heat pump is a solid-state
active heat pump which transfers heat from one side of the device
to the other. Peltier coolers are also called thermo-electric
coolers (TEC).
TEMPERATURE CONVERSIONS
Kelvin temperature conversion
formulas
|
To find
|
From
|
Formula
|
Celsius
|
kelvin
|
°C = K - 273.15
|
kelvin
|
Celsius
|
K = °C + 273.15
|
Fahrenheit
|
kelvin
|
°F = (K × 1.8) - 459.67
|
kelvin
|
Fahrenheit
|
K = (°F + 459.67) ÷ 1.8
|
electronvolts
|
kelvin
|
eV ˜ K ÷ 11,604.5
|
kelvin
|
electronvolts
|
K ˜ eV × 11,604.5
|
|
kelvin
|
Celsius
|
Fahrenheit
|
Absolute zero
|
0 K
|
-273.15 °C
|
-459.67 °F
|
Melting point
of ice
|
273.15 K
|
0 °C
|
32 °F
|
Water's boiling
point
|
373.1339 K
|
99.9839 °C
|
211.9710 °F
|
THERMOELECTRIC EFFECT
The Peltier-Seebeck
effect, or thermoelectric effect, is the direct conversion of thermal
differentials to electric voltage and vice versa.
TORR
Torr or millimeter of
mercury (mmHg) is a unit of pressure. It is the atmospheric pressure
that supports a column of mercury 1 millimeter high. Normal atmospheric
pressures can support 760mm of mercury, so 1/760 of an atmosphere
is a convenient measurement point expressed as torr.
VACUUM PRINCIPLES (MFP,
OUTGASSING, CRYOPUMPS, REGENERATION)
A vacuum is a volume of space that is almost empty of matter, so
that gaseous pressure is much less than standard atmospheric pressure.
The quality of a vacuum is measured by how closely it approaches
a perfect vacuum. The residual gas pressure is the primary indicator
of quality, and it is most commonly measured in units of torr.
Lower pressures indicate higher quality. The lowest pressure currently
achievable in a laboratory is about 10-13 Torr.
OUTGASSING
Evaporation into a vacuum is
called outgassing. All materials, solid or liquid, have a small vapor
pressure, and their outgassing becomes important when the vacuum
pressure falls below this vapor pressure. In man-made systems, outgassing
has the same effect as a leak and can limit the achievable vacuum.
Outgassing products may condense on nearby colder surfaces, which
can be troublesome if they obscure optical instruments or react with
other materials.
The most common outgassing product
in man-made vacuum systems is water absorbed by chamber materials.
It can be reduced by desiccating or baking the chamber, and removing
absorbent materials. High vacuum systems must be clean and free of
organic matter to minimize outgassing.
Ultra-high vacuums are usually
baked to temporarily raise the vapor pressure of all outgassing materials
in the system and boil them off. Once the bulk of the outgassing
materials are boiled off and evacuated, the system may be cooled
to lower vapor pressures and minimize residual outgassing during
actual operation. Some systems are cooled well below room temperature
by liquid nitrogen to shut down residual outgassing and simultaneously cryopump the
system.
One of the most important parameters
is the mean free path (MFP) of residual gases, which
indicates the average distance that molecules will travel between
collisions with each other. Vacuum quality is subdivided into ranges
according to the technology required to achieve it or measure it.
These ranges do not have universally agreed upon definitions, but
a typical distribution is as follows:
Atmospheric pressure
|
760 Torr
|
Low vacuum
|
760 to 25 Torr
|
Medium vacuum
|
25 to 1×10-3 Torr
|
High vacuum
|
1×10-3 to 1×10-9 Torr
|
Ultra high vacuum
|
1×10-9 to 1×10-12 Torr
|
Extremely high vacuum
|
<1×10-12 Torr
|
Outer Space
|
1×10-6 to <3×10-17 Torr
|
Perfect vacuum
|
0 Torr
|
- Atmospheric pressure is standardized at 760
Torr.
- Low vacuum, also called rough vacuum or coarse
vacuum, is vacuum that can be achieved or measured with rudimentary
equipment such as a vacuum cleaner and a liquid column manometer.
- Medium vacuum is vacuum that can be achieved
with a single pump, but is too low to measure with a liquid or mechanical
manometer.
- High vacuum is a vacuum where the MFP of
residual gases is longer than the size of the chamber or of the
object under test. High vacuum usually requires multi-stage pumping
and ion gauge measurement. Some texts differentiate between high
vacuum and very high vacuum.
- Ultra high vacuum requires baking the chamber
to remove trace gases, and other special procedures.
- Deep space is emptier than any artificial vacuum
that we can create.
- Perfect vacuum is an ideal state that cannot
be obtained in a laboratory, or even in outer space.
Examples
Vacuum cleaner
|
(600 Torr)
|
liquid ring vacuum pump
|
(24 Torr)
|
freeze drying
|
(1 to 0.1 Torr)
|
Incandescent light bulb
|
(0.1 to 0.01 Torr)
|
Thermos bottle
|
(10-2 to 10-3 Torr)
|
Near earth outer space
|
(10-6 Torr)
|
Cryopumped MBE chamber
|
(10-9 Torr to 10-11 Torr)
|
Pressure on the Moon
|
(10-11 Torr)
|
Interstellar space
|
(10-17 Torr)
|
VACUUM PUMPS
Pumps can be broadly categorized according to three techniques:
- Positive displacement pumps use a mechanism to repeatedly
expand a cavity, allow gases to flow in from the chamber, seal off the cavity,
and exhaust it to the atmosphere.
- Momentum transfer pumps, also called molecular
pumps, use high speed jets of dense fluid or high speed rotating
blades to knock gaseous molecules out of the chamber.
- Entrapment pumps capture gases in a solid or absorbed
state. This includes cryopumps, getters, and Ion pumps.
Cryopump
A cryopump is a vacuum pump that traps gases and vapors by condensing them
on a cold surface. They are only effective on selective gases, depending on
the freezing and boiling points of the gas relative to the cryopump's temperature.
They are sometimes used to block particular contaminants. Cryopumps are commonly
cooled by liquid nitrogen, or stand-alone versions may include a built-in cryocooler.
Baffles are often attached to the cold head to expand the surface area available
for condensation, but they also increase the radiative heat uptake of the cryopump.
Over time, the surface eventually saturates with condensate and the pumping
speed gradually drops to zero. It will hold the trapped gases as long as it
remains cold, but it will not condense fresh gases from leaks until it is regenerated.
Saturation happens very quickly in low vacuums, so cryopumps are usually only
used in high or ultrahigh vacuum systems.
Regeneration of a cryopump is the process of evaporating the
trapped gases. This can be done at room temperature and pressure, or the process
can be made more complete by exposure to vacuum and faster by elevated temperatures.
Best practice is to heat the whole chamber under vacuum to the highest temperature
allowed by the materials, allow time for outgassing products to be exhausted
by the mechanical pumps, and then cool and use the cryopump without breaking
the vacuum.
|